استانداردهای مرتبط با پمپهای خلأ و عملکرد آنها
ISO 3529-2:2020: Vacuum technology — Vocabulary — Part 2: Vacuum pumps and related terms
ISO 1608-1:1993: Vapor vacuum pumps — Measurement of performance characteristics — Part 1: Measurement of volume rate of flow (pumping speed)
ISO 1608-2:1989: Vapor vacuum pumps — Measurement of performance characteristics — Part 2: Measurement of critical backing pressure
ISO 21360-1:2020: Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 1: General description
ISO 21360-2:2020: Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 2: Positive displacement vacuum pumps
ISO 21360-3:2019: Vacuum technology — Standard methods for measuring vacuum pump performance — Part 3: Specific parameters for mechanical booster vacuum pumps
ISO 21360-4:2018: Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 4: Turbomolecular vacuum pumps
ISO 27892:2010: Vacuum technology — Turbomolecular pumps — Measurement of rapid shutdown torque
استانداردهای مرتبط با خلأسنج ها و کالیبراسیون
ISO 3529-3:2014: Vacuum technology — Vocabulary — Part 3: Total and partial pressure vacuum gauges
ISO 3567:2011: Vacuum gauges — Calibration by direct comparison with a reference gauge
ISO 19685:2017: Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for Pirani gauges
ISO 20146:2019: Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges
ISO/TS 20175:2018: Vacuum technology — Vacuum gauges — Characterization of quadrupole mass spectrometers for partial pressure measurement
ISO/TS 20177:2018: Vacuum technology — Vacuum gauges — Procedures to measure and report outgassing rates
ISO 14291:2012: Vacuum gauges — Definitions and specifications for quadrupole mass spectrometers
ISO 27893:2011: Vacuum technology — Vacuum gauges — Evaluation of the uncertainties of results of calibrations by direct comparison with a reference gauge
ISO 27894:2009: Vacuum technology — Vacuum gauges — Specifications for hot cathode ionization gauges
استانداردهای مرتبط با اتصالات و شیرهای خلأ
ISO 1609:2020: Vacuum technology — Dimensions of non-knife edge flanges
ISO 2861:2020: Vacuum technology — Dimensions of clamped-type quick-release couplings
ISO 3529-1:2019: Vacuum technology — Vocabulary — Part 1: General terms
ISO 3669:2020: Vacuum technology — Dimensions of knife-edge flanges
ISO 9803-1:2020: Vacuum technology — Mounting dimensions of pipeline fittings — Part 1: Non knife-edge flange type
ISO 9803-2:2020: Vacuum technology — Mounting dimensions of pipeline fittings — Part 2: Knife-edge flange type
ISO 21358:2020: Vacuum technology — Right-angle valve — Dimensions and interfaces for pneumatic actuator
ISO 27895:2009: Vacuum technology — Valves — Leak test